Because wet processing of silicon wafers uses different types of chemicals, semiconductor manufacturing facilities need chemical handling equipment to store, deliver and dispose of the chemicals. A complete chemical handling system takes care of all aspects of chemical use and ensures chemicals are delivered to the process when and where needed.
For corrosive, toxic, or flammable chemicals, safe handling is critical. Most of the chemicals used in wet processing can’t be released into the environment without additional treatment. Neutralizing dangerous chemicals on site or storing them in safe containers until they can be transported to a treatment facility must be documented to comply with local regulations.
Since chemicals are often dangerous to the employees operating wet processing systems, the chemical handling equipment has to be designed to minimize spills and reduce employee exposure to chemicals and their fumes. A comprehensive chemical handling system can improve workplace safety, reduce spills and waste, and make chemical processes more efficient.
Chemical Delivery Systems Provides Your Process the Chemicals It Needs
Chemical delivery systems store the chemicals safely and then deliver the right quantities, mixtures, and concentrations directly to the production line. The amount of chemicals delivered has to be precise and repeatable. Successful wet processing often depends on the right mixture or concentration because etching, stripping, and cleaning can vary with the amount of chemicals in the bath. When processing batches, the amounts delivered must be precisely the same for each batch. With continuous processing, the chemicals delivered can’t vary over time.
Modutek has a complete range of chemical delivery equipment, from high volume systems for large continuous production lines to small batch operations. Chemicals can be stored remotely in large totes with a load cell interface or in 55-gallon drums near the wet process station. Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation applications can calculate the exact quantities of chemicals required, and the chemical delivery systems provide precisely the calculated amounts. These systems ensure that chemical handling and process repeatability are excellent.
Modutek’s Collection Systems Remove Used Chemicals from Processing Stations
Once a wet process such as cleaning, etching, or stripping is complete, the used chemicals must be removed from the process stations and collected. Chemicals can be stored in safe containers and sent to a company specializing in neutralizing and disposing of hazardous chemicals, or they may be neutralized on-site.
To collect the chemicals from processing stations, chemical lift stations can pump the chemical waste from the process tank to a storage container. Chemical carts, also called pump carts or collection carts, can be moved near the process tanks to empty smaller amounts of chemicals. Storage can range from small carboys to large collection tanks. For small volumes, waste chemicals can be pumped directly into a five-gallon DOT-approved carboy for subsequent shipping to an off-site neutralization facility.
Acid Neutralization Systems Ensure Compliance with Environmental Standards
Many wet process semiconductor manufacturing steps use strong acids in their process baths. The used acids must be disposed of safely without risks to employees, the general public, or the environment. Local regulations specify how acid waste must be treated to ensure that disposal meets these requirements.
As regulatory compliance becomes more complex, the costs of disposing of chemical waste off-site are increasing. Modutek can provide self-contained acid neutralization systems that are inexpensive to operate. These systems add neutralizing chemicals to the acid waste and track chemical use, waste pH, and discharge quantities. The systems can generate documentation for regulatory compliance and safely dispose of the neutralized waste.
Modutek Offers In-House Expertise for Selecting Chemical Handling Equipment
Modutek can help customers choose the right chemical handling equipment for their facility. In-house experts at Modutek can recommend equipment from a full line of chemical handling systems. Modutek can customize equipment for special applications and ensure that the systems meet customer needs. Contact Modutek today for t a free consultation to discuss your chemical handling needs.
