Wet bench stations come in a variety of configurations designed for different applications. It can be difficult to make a selection from the many possibilities and make sure the equipment you choose will best meet your requirements. One way to cut down on the uncertainty and to structure the selection process is to emphasize three areas where your needs have to be satisfied.
A Wafer Processing Station has to comply with the standards and regulations in effect for your operation; it has to be able to carry out the processes that you are considering; and it has to be automated in accordance with what you need. When you consider these three areas and find equipment that fulfills your requirements in each one, you will be closer to making a final selection.
Compliance with Standards
Wet bench standards aim to ensure safe operation and resistance to combustion. Modutek wet bench stations comply with the following standards:
- NFPA 70 – National Fire Protection
- NFPA 79 – Safety of Industrial Machinery
- NEC – National Electrical Code
- UL508a -Standard for Industrial Control Panels
If the equipment is to be installed outside the US, Modutek can also comply with the national standards of Europe (CE Mark), Canada (CSA) and Australia/New Zealand (AS/NZS3000). In addition to complying with these standards, Modutek can supply third party certification for compliance.
Applications
Depending on the process required, Modutek can supply the right systems and advise on the advantages of specific products from their complete line of wet bench equipment. Standard Modutek wet bench stations can support both acid and solvent processes while the stainless-steel line is designed for solvent processes such as those using acetone or IPA. Optional equipment for specific processes is also available.
Automation
Modutek offers manual, semi-automated and fully automated wet bench stations. Which best meets your requirements depends on how you plan to conduct wet process operations. A manual bench may be appropriate for low volume custom or prototype device processes. For higher volume with standard processes, a degree of automation improves your throughput and reduces human error. Modutek’s stations are all built with the same high-quality materials, but the company can supply the degree of automation that matches your needs.
Manual wet bench stations feature competitive pricing with a low total cost of ownership. Modutek can supply the benches at any size and length and to meet any wet process needs. Custom designs are possible and future expansion of the process line is easy.
Semi-automated wet bench stations include robots for uniformity of process execution without the cost of full automation. The servomotors of the robots operate with three degrees of freedom and give you precise control of etching and cleaning. The Modutek-designed software, SolidWorks Simulation Professional and SolidWorks Flow Simulation, calculates process flow. The semi-automated wet bench stations have all the features and characteristics of the manual stations but include a touch screen with a graphic user interface to control the robotics and run the process.
Fully automated wet bench stations track chemical use and ensure precise dosages and accurate process control for improved yields and excellent repeatability. The elimination of human error and fully automated control is especially important for processes with tightly packed semiconductor structures and dense circuitry. Full automation guarantees a consistent process environment that reduces defects and improves output quality.
Modutek designs, assembles and tests all robotic equipment in house and is therefore ideally situated to advise customers on solutions to meet their needs and customize equipment to fit any customer application. The company can help clearly define process requirements for their customers and then propose solutions that allow customers to determine which wafer processing station is ideal for their facility.
