Manufacturing lines in semiconductor fabrication facilities and research labs use corrosive chemicals to clean and etch silicon wafers. Depending on the semiconductor product, a silicon wafer may undergo multiple steps in baths containing chemicals such as hydrochloric acid or hydrogen peroxide. When the cleaning or etching process in a particular fabrication step is complete, the chemicals must be rinsed from the wafer before the silicon wafer can be processed further. Quick Dump Rinsers provide a quick and effective way of thoroughly rinsing the wafers without introducing new contaminants.
How Quick Dump Rinsers Work
Once wafers are placed into the rinser, powerful jets spray de-ionized water over the wafers to remove all traces of chemicals. As the rinse tank fills up, chemical residue and contaminating particles are flushed out and rise to the surface. A nitrogen gas bubbler system serves to agitate the de-ionized water further, removing additional contaminants from the surface of the wafers. An overflow weir allows the surface water to flush the chemicals and particles out of the tank. When the rinsing process is complete, the quick dump door at the bottom of the tank opens and the water drains out in a matter of seconds.
The key characteristics of a Quick Dump Rinser are rapid operation, complete removal of contaminants and avoiding the addition of new contamination. Rapid operation helps reduce the use of de-ionized water and saves process time. If traces of chemicals are not completely removed, etching of the wafer might continue and result in defective or low quality products. The same is true if particles are not eliminated or are added during the rinse. Since rinsing has to be carried out at the end of many process steps, Rinser performance is critical for product output quality.
Modutek’s DR Series Quick Dump Rinser Features
Modutek’s Quick Dumps Rinsers are designed to meet the needs of advanced semiconductor fabrication. Wet process semiconductor manufacturing facilities and research labs can use the Modutek rinsers as stand-alone units or integrated into a wet process manufacturing line. The rinsers work quickly and deliver completely clean wafers. They incorporate the following features:
- Contoured vessel design
- Nitrogen bubbler on all models
- Natural polypropylene or PVDF (option) tanks, nozzles and fittings
- Large machined dump door without gaskets or seals
- 360 degree overflow weir
Modutek’s design minimizes de-ionized water consumption and reduces rinse times while ensuring effective rinsing. The tanks require a de-ionized water supply, a source of pressurized nitrogen and a 120 or 24 V AC power supply. Options include a reclaim system, Teflon nozzles, fittings and valves, and special process cover configurations. The rinsers are available in a variety of sizes.
How Modutek’s DR Series Rinsers Improve Silicon Etching Results
Semiconductor manufacturing makes use of ever smaller microstructures and circuit connections. During wet etching of the silicon wafers, even a tiny particle can block a circuit path or deform microstructure design. Modutek’s rinsers are designed and constructed to avoid particle contamination.
The contoured vessel and machined trap door avoid entrapment of particles in corners or in cracks around seals and gaskets. The nitrogen bubbler helps dislodge any particles remaining on the surfaces of the silicon wafers. The 360 degree overflow weir gets rid of contaminants in the surface water quickly and the polypropylene material avoids the addition of metallic particles from fittings.
Modutek’s DR Series Quick Dump Rinsers are state-of-the-art process rinsing modules that work quickly and rinse completely. Used together with wet bench stations from Modutek’s extensive line of silicon wet etching equipment they can deliver exceptional performance for semiconductor manufacturing facilities and research labs. Contact Modutek for a free consultation on selecting the best equipment that will meet your manufacturing requirements.
