Depending on the degree of automation, software controls can enhance wafer manufacturing facility performance and achieve improved results. Full automation lets operators take advantage of different operational modes to test new process steps and optimize process variables. The controls can then run the process with precise repeatability and often without operator intervention. The reduction in operator error, monitoring chemical concentration with dosing capability and the increased reliability can result in higher yields and reduced costs with more efficient silicon wafer processing.
Automation controls in wafer manufacturing equipment must be reliable and accurate enough to reproduce exact chemical doses and process times, but flexible enough to permit technicians to make changes when needed. An intuitive operator interface, transparent programming of process steps, and easy adaptation of variables to new requirements help achieve excellent results. Software controls that deliver reliable reproduction of existing processes along with flexible programming for responding to changing requirements can significantly improve facility output.
Software Must Combine Support for Current Operations and Meet Future Needs
Modutek’s software can set process parameters such as chemical dosage, wafer etching, and cleaning times as well as other process parameters. Touch screens with a Graphic User Interface (GUI) allow operators to see process status and intervene if necessary. The displayed process shows the information on the status of the processing equipment. In addition, all set points can be easily modified to reflect your requirements. The software Modutek provides combines operational reliability with the flexibility needed to adapt the programs to new situations or requirements.
Optional Equipment Interface Makes Sure Commands Are Executed Correctly
Modutek offers SECS/GEM protocol or Ethernet access for the data logging interface. This interface allows Modutek to make output changes and integrate new wafer manufacturing equipment while ensuring that software commands are executed properly and accurately. Operators can read displays of process characteristics on the GUI to ensure command execution takes place as expected. All these options are reviewed during the station design layout process to ensure it meets your process and budget requirements.
Peripheral Control Features Can Enhance Software Performance
Data logging can improve performance by providing operators with additional information that allows them to optimize operations. Data loggers can track indicators such as output, process temp, processing times, and all alarm features. All data can form the basis for an evaluation of facility performance and plans for targeted changes to reach clearly defined goals.
Modutek can integrate standard or custom peripheral control features as needed by customers for specific applications. Customers may require certain information to optimize their process or depend on output data for subsequent action. Modutek can analyze such requirements and add the necessary functionality, both in terms of sensors or additional equipment and to ensure the information is processed and presented in a useful format.
Designing and Building Advanced Software Controls to Improve Silicon Wafer Processing
As a leading wet bench manufacturer with extensive experience and expertise in designing and building equipment in-house, Modutek works with customers to ensure their software controls meet their needs. In addition to providing excellent customer support, Modutek can evaluate complex customer applications to propose the best possible solutions. Contact Modutek for a free consultation to discuss your manufacturing equipment needs.
