Modutek’s Teflon tanks are custom designed for use in new and existing wet processing stations. Their modular configuration allows easy integration in customer clean room facilities. Advanced PFA Teflon welding techniques reduce impurities and unwanted by-products in the process, and Modutek can supply heated models for use in processes that require temperature control. Standard carrier sizes are available for single or double capacity, and Modutek can design and build custom tanks for specific customer requirements. Additional options and features make Modutek’s Teflon tanks suitable for a variety of wet process applications.
Teflon Tank Configurations
Modutek offers three types of Teflon tanks:
- The TT series are ambient temperature baths
- The TI series are temperature controlled static baths
- The TFa series are temperature controlled overflow recirculating baths
Modutek can work with customers to analyze their process requirements and recommend the best tank configuration. All tanks are manufactured from the highest quality material and come with first-class support from in house technicians at Modutek.
Temperature-Controlled Teflon Tanks
Modutek offers static and recirculating temperature-controlled Teflon tanks for KOH (potassium hydroxide) and TMAH (tetramethyl ammonium hydroxide) anisotropic etching of silicon. The heat sources can be in line and an immersion heater in the overflow weir. The tanks feature all-Teflon fluid paths and low level, high limit and high-temperature signaling. A drain interlock is standard.
The temperature control delivers fast heating of two to three degrees centigrade per minute within a range of 30 to 100 degrees centigrade. Process temperature control is accurate to within plus/minus 0.5 degrees and the tanks feature an optional Teflon refluxor with Teflon cooling coils. The fast and accurate temperature control system lets operators achieve excellent consistency and repeatability for temperature-sensitive processes such as TMAH and KOH etching.
Teflon Tank Features
Modutek designs their Teflon tanks for ease of use, convenient installation, quick repair and excellent compatibility with new or existing customer facilities. Specific features include:
- 360-degree serration overflow
- Manual cover with overlapping seal
- Modular design
- Minimal water loss
- Consistent chemical concentration over time
- One year warranty
The design of Modutek’s Teflon tanks results in fewer defects in output and a higher product quality overall.
Teflon Tank Options
Modutek tanks can be ordered with the following options:
- A pneumatically operated automatic cover
- Teflon gravity drain system
- Aspirator valve system
- An RS232 Interface
- Remote operation timer switches
- Temperature process controller/timer
- Teflon refluxor with Teflon cooling coils
- Magnetic stirrer for agitation
- DI water or IPA spiking system
Benefits of the Modutek Teflon Tanks
Modutek’s design and configuration results in the following specific benefits:
- Uniform heating throughout the bath
- Accurate and rapid temperature control
- Process etch variability wafer to wafer less than 2 percent
- Modutek in house maintenance and repair support
- Extensive customization to meet specific requirements
Based on the standard Teflon tank design, Modutek can use its design expertise to supply Teflon tanks of the highest quality, sized to customer specifications and with the features and options required for the customer’s application.
Modutek Support
With over 35 years experience in wet bench stations, Modutek can offer effective support for customer wet process applications. The company manufactures a full line of semiconductor fabrication equipment and can help customers analyze their needs. With its wet process expertise and its experienced technical personnel, Modutek can offer help with selecting the best possible wet bench equipment configuration. The company offers free consulting to ensure that customers select the right equipment. Whether it is Teflon tanks or a complete wet process semiconductor manufacturing line, Modutek can help determine what the requirements will be, suggest optimal solutions and deliver the appropriate equipment.
