An increasing number of silicon wafer fabrication applications, such as those with large size substrates or densely packed components, require tight process control. Accurate chemical dosage and precise process timing become critical for a high-quality output. Manual and semi-automatic controls depend on operator training and reliable operator execution of instructions, leaving open the possibility of human error and a variation in how process steps are carried out. Fully automated wet benches and chemical stations can improve process control accuracy and help with consistent execution. Software can help calculate process variables and ensure correct dosages. Full automation of the wafer fabrication process with the use of software for process control and robotics for wafer handling can result in better repeatability, reduced waste and improve production line performance.
Advantages of Modutek’s Fully Automated Wafer Fabrication Equipment
Modutek designs, develops and manufactures its wafer fabrication equipment in house to the highest quality standards. The SolidWorks Simulation Professional and SolidWorks Flow Simulation software are developed and supported in house by Modutek’s technical personnel. As a result, Modutek has the expertise to determine what is needed to meet the requirements of a specific customer’s application. It can supply standard wet bench chemical stations or customized equipment to exactly meet the needs of its customers, tailoring its equipment and software to fit any special process control requirements.
To satisfy customer requirements, Modutek can draw upon its complete line of wafer fabrication equipment. Its wet benches and chemical stations can handle both solvent and acid applications, and the equipment can process sizes up to 30 inches by 60 inches. Its software can run simulations, calculate chemical dosage and track chemical use. With its in-house expertise, Modutek can offer unparalleled customer support and comprehensive after sales service.
Benefits of Fully Automated Wafer Processing Equipment
Full automation means that the process is set up and can then run repeatedly in exactly the same way without requiring any operator input. Key factors for improved process control are accurate chemical dosage, precise timing of process steps, exact replication of the process sequence and full neutralization of chemical waste. Because operation of the automated program is transparent and recorded, technical personnel can optimize the individual steps to minimize chemical use and reduce waste. Process times can be adjusted to take into account special features of the application and results can be monitored for potential problems.
When the process automation is fully optimized, consumption of chemicals is reduced. Process output stays constant, the number of defective products is lower and the products are of consistently high quality. There are fewer spills and dosage errors while employee safety is higher. Compliance with environmental regulations in terms of chemical use and discharge is easier because chemical consumption is tracked at all times and the neutralization of discharges is ensured. The process environment is consistent and the optimized process can be repeated reliably.
As a result, wafer fabrication facilities that implement full automation experience lower costs due to reduced chemical use. Yield and throughput increase while output quality remains consistent and high. Production line performance and productivity improve and facility profitability can rise.
How Modutek Can Help
With over 35 years experience in wet bench process and wafer fabrication equipment, Modutek can evaluate a customer’s process needs and offer standard equipment or customized solutions as appropriate. Their engineers can work closely with each customer to identify what is required and ensure that the equipment works as expected. Modutek’s fully automated stations are an excellent choice for reliable and technologically advanced solutions to challenging wafer fabrication requirements. If you need highly reliable wafer fabrication equipment to support your semiconductor manufacturing process call Modutek for a free consultation at 866-803-1533 or email Modutek@modutek.com.
