Modutek Corporation, a leading provider of wet bench stations and wet process equipment, will be at the Semicon Conference in Shanghai China from March 14-16, 2018 with their factory representative Laserwort Ltd. They will be located in Hall N2 at booth 2431. Information about the Semicon Conference can be referenced at http://www.semiconchina.org/ and details on Modutek’s attendance at the conference can be referenced at: Modutek at Semicon Conference in China
Come by the Modutek /Laserwort booth to get information and answer any questions you have about using Wet Bench Process Stations for acid/base, solvent and ozone cleaning or photo resist strip. In addition Modutek will also provide information about the benefits of their new IPA vapor dryer with the HF last process. Modutek serves customers around the world who require any type of wet processing equipment and builds chemical delivery systems for pharmaceutical, biochemical, solar and semiconductor manufacturing.
Additional details on some of Modutek’s products are listed below:
Single Chamber HF Last IPA Vapor Dryer
Benefits include:
- Most drying cycles completed within 10 to 15 minutes
- Very low consumption of IPA
- No moving parts inside drying chamber eliminating wafer breakage
- Eliminates watermarks
- Drying technology can be designed into wet bench eliminating one transfer step
Features include:
- Single drying chamber for DI water rinsing and IPA vapor drying
- On board HF metering for precision mix ratios
- Uses an in situ HF etch process with a rinse step before the IPA drying cycle
- Filter bypass for contamination control with no cassette contact points
- Easy to change IPA bottles
- Handles all process sizes (standard wafer carriers to glass substrates)
Fully-automated Wet Bench Equipment
Benefits include:
- In house customization to meet customer process requirements
- Precise automated process execution and reliable repeatability
- Full automation control with touch screen
- Improved yield and reduced errors
- SolidWorks Simulation software for accurate calculation of process parameters
- All robotics and software design designed in house
- Complete design, assembly and test at one location to meet your specifications
Semi-automated Wet Bench Equipment:
Benefits Include:
- Automation control with touch screen
- Servo motor automation
- SolidWorks Flow Simulation software
- SolidWorks Simulation Professional software
- All robotics and software designed and developed in house
- Complete design, assembly and test at one location to meet your specifications
Benefits Include:
- High end manual equipment at competitive pricing
- Meets or exceeds all current safety standards
- Low cost of ownership
- Designed to meet any process requirements
- Can accommodate custom designs and processes
- Equipment designed for future expansion
All wet bench equipment supports the following applications:
- KOH Etching
- Quartz cleaning
- Ozone Strip
- Ozone Cleaning
- SC1 & SC2 (RCA Clean)
- Megasonic Cleaning
- BOE (Buffered Oxide Etching)
- MEMs processing
- All solvent applications
- Hot phosphoric (Nitride Etching)
- SPM Cleaning
- Precision Part Cleaning
Modutek has over 37 years of industry experience and expertise in developing and building wet bench stations and wet process equipment that provides highly reliable results for precision processes. They also provide world-class service, and customer support. Contact Modutek at 866-803-1533 or email Modutek@Modutek.com for a free quote or consultation to discuss your requirements.
