Modutek Corporation, a leading supplier of wet bench stations and wet process equipment, will be at the Semicon Conference located at the Shanghai International Expo Center in China from March 20-22, 2019. At the Conference Modutek and their factory representative Laserwort Ltd., will be located in Hall N3 at booth 3243. Additional details about the Semicon Conference in China can be referenced at: http://www.semiconchina.org/
Representatives at the Modutek /Laserwort booth will be available to answer questions and provide information on using Wet Bench Stations for acid/base, solvent and or photo resist strip. In addition Modutek will also provide information about the benefits of their new IPA vapor dryer with the HF last process. Modutek serves customers around the world and builds customized wet bench stations and wet processing equipment for customers in many industries including pharmaceutical, biochemical, solar and semiconductor manufacturing.
Additional details on some of Modutek’s products are listed below:
Single Chamber HF Last IPA Vapor Dryer
Benefits include:
- Very low consumption of IPA
- Most drying cycles completed within 10 to 15 minutes
- Eliminates watermarks
- No moving parts inside drying chamber eliminating wafer breakage
- Drying technology can be integrated into wet bench eliminating one transfer step
Features include:
- Single drying chamber for DI water rinsing and IPA vapor drying
- Easy to change IPA bottles
- Filter bypass for contamination control with no cassette contact points
- On board HF metering for precision mix ratios
- Uses an in situ HF etch process with a rinse step before the IPA drying cycle
- Handles all process sizes (standard wafer carriers to glass substrates)
Fully-automated Wet Bench Equipment
Benefits include:
- In house customization to meet customer process requirements
- Precise automated process execution and reliable repeatability
- Full automation control with touch screen
- Improved yield and reduced errors
- SolidWorks Simulation software for accurate calculation of process parameters
- All robotics and software design designed in house
- Complete design, assembly and test at one location to meet your specifications
Semi-automated Wet Bench Equipment:
Benefits Include:
- Automation control with touch screen
- Servo motor automation
- SolidWorks Flow Simulation software
- SolidWorks Simulation Professional software
- All robotics and software designed and developed in house
- Complete design, assembly and test at one location to meet your specifications
Benefits Include:
- High end manual equipment at competitive pricing
- Meets or exceeds all current safety standards
- Low cost of ownership
- Designed to meet any process requirements
- Can accommodate custom designs and processes
- Equipment designed for future expansion
All wet bench equipment supports the following applications:
- KOH Etching
- Quartz cleaning
- Ozone Strip
- Ozone Cleaning
- SC1 & SC2 (RCA Clean)
- Megasonic Cleaning
- BOE (Buffered Oxide Etching)
- MEMs processing
- All solvent applications
- Hot phosphoric (Nitride Etching)
- SPM Cleaning
- Precision Part Cleaning
Modutek has over 38 years of industry experience and expertise in designing and building wet bench stations and wet process equipment that provides highly reliable and consistent results for precision processes. They also provide world-class service, and customer support. Contact Modutek for a free consultation or quote at 866-803-1533 or email Modutek@Modutek.com.
Reviewed and Approved by Douglas Wagner
President & CEO, Modutek Corporation
