Wet Bench Equipment
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The semiconductor device fabrication process has a long cycle time, typically taking about 12 weeks to complete and 14-20 weeks for advanced processes. As such, any wet bench systems used for wafer fabrication must be reliable and precise to meet all manufacturing process requirements. No one understands this better than Modutek, so we focus on providing customers with the industry’s highest quality and most reliable wet bench equipment.
Modutek’s Expertise and Experience
Modutek has been in the wet bench manufacturing and wet processing equipment business for over 40 years. During that time, we have become recognized as one of the leaders in the industry. Our wet bench equipment is available in a wide array of configurations. We work with you to design and configure our equipment to meet the wet processing needs of your application and work within your budget. The standard design of all of our equipment supports both acid and solvent applications. In addition, all of our process control software is developed and supported in-house to your specifications. This means you don’t have to worry about equipment components being outsourced to organizations not familiar with your needs.
Wet Bench Equipment Options
There’s rarely a “one-size-fits-all” solution when it comes to micro-fabrication. That’s why at Modutek we offer a wide variety of wet bench station options to meet your specific needs.
- Automated wet bench systems: Our fully automated wet bench systems assist in wafer fabrication using our SolidWorks Simulation Professional and SolidWorks Flow Simulation software programs. This improves your etch rates while offering advanced throughput to increase your yields. Our wet bench equipment can handle all process sizes, from standard wafer carriers to larger glass solar panels.
- Semi-automated wet bench systems: Our semi-automated systems are also available in various configurations to help with wafer processing. These stations offer more precision than a manual station without the higher costs of fully automated equipment. This is done using a servo-controlled robot offering three degrees of freedom. Like our fully automated options, Modutek’s semi-automated wet bench systems use the SolidWorks Professional and Flow software packages.
- Manual wet process stations: Our manual wet process stations offer the same features as our automated systems without using robotics. This provides customers with low-cost equipment that is effective and configured to allow for future expansion, if necessary.
- Dry-to-Dry Wet Process: Our dry-to-dry wet benches incorporate our MVD Series IPA Dryer, which allows for drying without using a separate tool. This shortens the overall manufacturing process, allowing for greater yields. The IPA Dryer is also available for purchase as a stand-alone tool.
Our products, including our wet bench systems, are designed and built on-site at our San Jose facility. Every product is tested and certified to meet industry standards and subjected to a rigorous final approval process with you and your team. Our products and their component parts are covered under a one-year warranty.
Equipment Designed to Meet Your Specific Requirements
Trust one of the most respected names in the wet processing business to design, build, and configure your next wet bench system. At Modutek, we will only place our name on wet bench equipment that meets our high quality and reliability standards. You can trust our products will make your high-technology manufacturing process infinitely easier. Contact us for a free consultation or quote.
