Automated Wet Bench and Wet Processing Systems

Modutek’s engineers work closely with each customer to design wet bench systems to meet their unique requirements. As components become more densely packed, precise control of process times and chemical dosage become important for improving results. To comply with strict environmental regulations, chemical waste has to be minimized and neutralization of discharges ensured. Full automation means that human error is eliminated, chemical usage is reduced and the process is tightly controlled. With Modutek’s SolidWorks Simulation Professional and SolidWorks Flow Simulation software, customers can improve etch rates and throughput while maintaining the highest output quality. The number of mistakes is reduced and the chemical dosage is calculated accurately. Tracking of chemical usage reduces waste and ensures correct usage according to the specific application. The process environment remains consistent at all times and processes are fully repeatable.