Dry to Dry Wet Process

Modutek’s Dry to Dry process equipment like our Fully Automated Equipment is available in a wide verity of configurations for your wet process requirements. We work with your engineering team to design the best wet processing / etching or cleaning equipment for your application. We handle all process sizes from standard wafer carriers, glass substrates to 30” x 60” glass solar panels. All wet process, etching or cleaning components are built and designed in-house giving you complete turnkey support. Our dry to dry process station utilizes our MVD Series IPA Dryer. This feature allows you continue to the next process step without having to dry in a separate drying tool. Eliminating transfer time is one very quick way to improve throughput and yield. Our SolidWorks Simulation Professional and SolidWorks Flow Simulation give you the process flow characteristic you require. This advanced software will improve your etch rates and throughput and also increases your yields. All robotic equipment is designed, assembled and tested at our San Jose, CA. We do not outsource or subcontract our robotic design. Final acceptance testing at Modutek is always available. All testing is performed using DI water.