The Modutek QFa Series of High Temperature Recirculating Quartz Tank is the result of almost 30+ years of evolutionary bath design and a passion for establishing the quality standard in quartz tanks. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership integrated into every aspect of our quartz tank products.
QFa Series Quartz Tanks/Baths:
High Temperature Recirculating Quartz Tanks:
The Modutek QFa Series of High Temperature Recirculating Quartz Tank is the result of almost 30+ years of evolutionary bath design and a passion for establishing the quality standard in quartz tanks. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership integrated into every aspect of our quartz tank products.
Benefits
Features
Specifications
Options
Benefits
Fast and even heater up
Heater longevity due to heater bonding technique
Custom sizes available
Serrated overflow (QFa Series)
Built-in diffuser at inlet connection for uniform flow (QFa Series)
All quartz flare type connection (QFa Series)
Multiple types of drain features available
Features
All quartz vessels are semiconductor-grade material
5-sided heater directly bonded to sidewalls of quartz vessel (Qa Series)
4-sided heater directly bonded to sidewalls of quartz vessel (QFa Series)
Dual safety snap switches
15’ Teflon-coated power cable with individual wires also Teflon coated
Over-temp type J thermocouple
External housing constructed using flame-retardant material with a sloped flange for chemical runoff
Specifications
Applications: Etching, Stripping, Cleaning
Chemical usage: H2SO4, H2O2, SC1, etc.
Operating temperature range: 30 º – 180 ºC
Process temperature control: ± 1 ºC (depends on controller and process)
Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
Circulating fluid inlet / outlet: 3/4” Male Flaretek
Process Vessel: Semiconductor grade, flame-polished, quartz
Housing: UL-94 VO rated FRPP
Process thermocouple: Teflon encapsulated J-type
Insulation: High density alumina silica fiber rated to 1260 º C
Options
Options
Liquid Level Sensor
Quartz diffuser plate
Process temperature controller
Autolid
Custom vessel sizes
Water Ring Seal (WRS) -30 month warranty, 360 degree Labyrinth seal, Contact us for specific bath price
QFa Matrix
Model nomenclature: model code, number of cassettes and size of cassettes. eg. QFa26(QFa series-2-6”)
Note: Add approximately 4” for drain on overall depth
Qa Series Quartz Tanks/Baths:
Constant Temperature Quartz Tanks:
The Qa Series Constant Temperature Quartz Tank is the result of over thirty years of evolutionary bath design and a passion for establishing the quality standard in quartz tank. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership engineered into every aspect of all our products.
Qa Series Quartz Tanks/Baths:
Constant Temperature Quartz Tanks:
The Qa Series Constant Temperature Quartz Tank is the result of over thirty years of evolutionary bath design and a passion for establishing the quality standard in quartz tank. At Modutek, we define quality by the degree of safety, reliability, and cost of ownership engineered into every aspect of all our products.
Benefits of Qa Series Quartz Tanks
Features
Specifications
Options
Benefits
Improves process yield by faster, more efficient, and even heating
Minimizes potential damage caused by runaway temperatures
Improves uptime and reliability due to longer vessel life
Features
Bonded 5-sided circuit heating element
Redundant safety devices
Seamless, sloped flange design
Specifications
Application: Etching, Stripping, Cleaning
Chemical usage H2SO4, H2O2, HCI, ETC
Operating temperature range: 30-180˚C
Process temperature control: ± 1.0˚C (depending on controller)
Heat-up rate: 2˚C per minute (rate affected by size of system, fluid, etc.)
One year warranty
Facility Reaquirements
Electrical: 208-240 VAC, 50/60 Hz, 1ø, 7-20 amps (depending on model and voltage)
Construction Materials
Process Vessel: Internally flame polished virgin fused quartz, boron-free