The DR Series quick dump rinser is Modutek’s most efficient process rinsing module. State-of-the-art engineering has eliminated particle entrapment, minimized rinsing time, reduced D.I. water consumption, and shortened dump time.
QFa Series Quartz Tanks/Baths:
WAFER DUMP RINSER:
The DR Series quick dump rinser is Modutek’s most efficient process rinsing module. State-of-the-art engineering has eliminated particle entrapment, minimized rinsing time, reduced D.I. water consumption, and shortened dump time.
Benefits
Features
Specifications
Options
Benefits
Contoured tank design to save water on each dump cycle
Custom sizes available for all applications
Drop-in design for easy installation for all wet stations
Available in natural polypro and PVDF material
Features
360° overflow weir
Large one-piece designed dump door
Top spray and bottom N2 agitation
Low misting top spray nozzles to eliminate overspray
Specifications
Operating temperature range: Ambient (Optional PVDF: 50 – 80º C)