Temperature Control Circulator
RCe Series Temperature Control Circulator: Precision Engineering for advanced semiconductor processes
Modutek’s RCe Series Temperature Control circulator sets the industry standard for chiller/heater units in semiconductor wet processing equipment. Engineered with reliability, safety, and performance, the RCe Series is designed to meet the exacting demands of your process requirements.
The RCe Series Temperature Control Circulator is composed of a network of components and devices that continuously monitor the system. It utilizes a compact design and an all-stainless steel fluid path to prevent corrosion and support the use of DI water. The system provides precise control to support your most demanding wet processing applications. Its robust design and advanced features ensure consistent, repeatable results while prioritizing safety and efficiency.
Reliability and Easy Maintenance
- Continuous system monitoring ensures uninterrupted operation
- Designed to reduce maintenance requirements and improve operational efficiency
- All-stainless steel fluid path prevents corrosion, compatible with DI water and aggressive chemicals
- Compact design (20.5″ x 25″ x 15.25″) maximizes cleanroom space efficiency
Safety-First Engineering
- Comprehensive safety features integrated into every aspect of the system
- Compliant with industry safety standards, minimizing operational risks
- Materials in the circulator are chemically compatible with the substances used in wet processes
Precision Temperature Control
- Achieves temperature stability within ±0.1°C
- Supports a wide range of wet processing applications
- Adaptable to specific semiconductor fabrication needs
User-Friendly Operation
- Intuitive interface for easy setup and monitoring
- Quick-access design for effortless maintenance
RCe Series
The Modutek RCe Series of Temperature Control Recirculators was engineered to establish the highest standard for chiller/heater units. We have accomplished this by incorporating reliability, cost of ownership, and safety into every aspect of our design. The RCe Series is composed of a network of components and devices which continuously monitors the system. With a compact design (20.5” x 25” x 15.25”) and an all stainless steel fluid path to prevent corrosion which allows the use of DI water, the RCe Series is the unit to buy!
Benefits
- Di water compatible, no corrosion
- Environmentally friendly
- Internationally accepted
- Easy confirmation of system status, reduced troubleshooting time
- Ease of maintenance with no fuses to replace
Features
- Stainless Steel fluid path
- CFC Free refrigerant (134A Freon)
- SEMI S2-93 & CE compliant
- User friendly status display
- Independent circuit breaker protection
System Specifications
- Heating Capacity: standard-1500W(other sizes available upon request)
- Cooling Capacity: standard – 1/4hp(other sizes available upon request)
- Stainless Reservoir with plastic as an option
- Accuracy: 0.2ºC – depending on controller
- Reservoir fill: Top of unit
- Dimensions: 20.5” (l) x 25” (w) x 15.25” (h)
Facility Reaquirements
- Electrical: 120VAC, 50/60Hz, 10, 20A (option : 208VAC, 4-wire Circuit)Rating for standard RCe025-1500)
- Circulating fluid: ½” FNPT inlet/outlet
- Remote controller: Modutek C21b or equivalent
Construction Materials
- Housing: Gray powder epoxy coated 16ga mild steel.
- Fluid Path: Tubing and Fittings- Stainless Steel(option: all polypropylene)
- Pump – Polypropylene
Applications
- Constant temperature baths (F series)
- Etching, Plating, and Developing
Benefits
- Di water compatible, no corrosion
- Environmentally friendly
- Internationally accepted
- Easy confirmation of system status, reduced troubleshooting time
- Ease of maintenance with no fuses to replace
Features
- Stainless Steel fluid path
- CFC Free refrigerant (134A Freon)
- SEMI S2-93 & CE compliant
- User friendly status display
- Independent circuit breaker protection
System Specifications
- Heating Capacity: standard-1500W(other sizes available upon request)
- Cooling Capacity: standard – 1/4hp(other sizes available upon request)
- Stainless Reservoir with plastic as an option
- Accuracy: 0.2ºC – depending on controller
- Reservoir fill: Top of unit
- Dimensions: 20.5” (l) x 25” (w) x 15.25” (h)
Facility Reaquirements
- Electrical: 120VAC, 50/60Hz, 10, 20A (option : 208VAC, 4-wire Circuit)Rating for standard RCe025-1500)
- Circulating fluid: ½” FNPT inlet/outlet
- Remote controller: Modutek C21b or equivalent
Construction Materials
- Housing: Gray powder epoxy coated 16ga mild steel.
- Fluid Path: Tubing and Fittings- Stainless Steel(option: all polypropylene)
- Pump – Polypropylene
Applications
- Constant temperature baths (F series)
- Etching, Plating, and Developing
Benefits
- Di water compatible, no corrosion
- Environmentally friendly
- Internationally accepted
- Easy confirmation of system status, reduced troubleshooting time
- Ease of maintenance with no fuses to replace
Features
- Stainless Steel fluid path
- CFC Free refrigerant (134A Freon)
- SEMI S2-93 & CE compliant
- User friendly status display
- Independent circuit breaker protection
System Specifications
- Heating Capacity: standard-1500W(other sizes available upon request)
- Cooling Capacity: standard – 1/4hp(other sizes available upon request)
- Stainless Reservoir with plastic as an option
- Accuracy: 0.2ºC – depending on controller
- Reservoir fill: Top of unit
- Dimensions: 20.5” (l) x 25” (w) x 15.25” (h)
Facility Reaquirements
- Electrical: 120VAC, 50/60Hz, 10, 20A (option : 208VAC, 4-wire Circuit)Rating for standard RCe025-1500)
- Circulating fluid: ½” FNPT inlet/outlet
- Remote controller: Modutek C21b or equivalent
Construction Materials
- Housing: Gray powder epoxy coated 16ga mild steel.
- Fluid Path: Tubing and Fittings- Stainless Steel(option: all polypropylene)
- Pump – Polypropylene
Applications
- Constant temperature baths (F series)
- Etching, Plating, and Developing
FAQ's about Temperature Controlled Circulators
Wet process temperature control refers to the precise regulation of temperatures in chemical baths or solutions used during semiconductor manufacturing processes. It ensures that chemical reactions proceed under optimal thermal conditions, which is critical for achieving consistent, high-quality results in cleaning, etching, or deposition steps. The temperature control circulators that Modutek provides deliver +/-0.5°C temperature control in sub-ambient etch applications. HF and BOE applications require precise temperature control to prevent over-etching. Modutek’s temperature control circulator provides precise control within a temperature range of 15°C to 23°C.
Wet processing temperature control systems can be customized to meet the unique process and chemical requirements used in semiconductor manufacturing. Modutek’s temperature control circulator is a sub-ambient control system that delivers precise temperature control with a temperature range of 15°C to 23°C. If your process requirement is within this range, Modutek’s system can be used in the process bath to meet your process specifications.
Wet process temperature control systems are designed with all-stainless steel fluid paths, ensuring resistance to corrosion and compatibility with a wide variety of aggressive chemicals commonly used in semiconductor wet processing. Modutek’s temperature control circulator utilizes an inline Teflon heat exchanger to provide precise temperature control. The Teflon heat exchanger can interface with most semiconductor processes.
Temperature control circulators from Modutek provide exceptional precision, maintaining temperature stability within ±0.1°C. This ensures that sensitive processes and experiments requiring high repeatability are conducted reliably and accurately.
Modutek’s systems include multiple safety features, such as over-temperature alarms, inline flow sensors, continuous monitoring, and fail-safe mechanisms, to prevent overheating and manage hazardous conditions effectively. These safeguards protect both operators and equipment.
Modutek’s circulators are designed for user-friendly operation, featuring intuitive controls and automated functions for enhanced ease of use. The systems require minimal maintenance, and Modutek offers comprehensive customer support and service plans to reduce downtime and ensure seamless operation.
Contact us if you need more information about using our Temperature Control Circulator to support your process.