Temperature Control Circulator
RCe Series Temperature Control Circulator: Precision Engineering for advanced semiconductor processes
Modutek’s RCe Series Temperature Control circulator sets the industry standard for chiller/heater units in semiconductor wet processing equipment. Engineered with reliability, safety, and performance, the RCe Series is designed to meet the exacting demands of your process requirements.
The RCe Series Temperature Control Circulator is composed of a network of components and devices that continuously monitor the system. It utilizes a compact design and an all-stainless steel fluid path to prevent corrosion and support the use of DI water. The system provides precise control to support your most demanding wet processing applications. Its robust design and advanced features ensure consistent, repeatable results while prioritizing safety and efficiency.
Reliability and Easy Maintenance
- Continuous system monitoring ensures uninterrupted operation
- Designed to reduce maintenance requirements and improve operational efficiency
- All-stainless steel fluid path prevents corrosion, compatible with DI water and aggressive chemicals
- Compact design (20.5″ x 25″ x 15.25″) maximizes cleanroom space efficiency
Safety-First Engineering
- Comprehensive safety features integrated into every aspect of the system
- Compliant with industry safety standards, minimizing operational risks
- Materials in the circulator are chemically compatible with the substances used in wet processes
Precision Temperature Control
- Achieves temperature stability within ±0.1°C
- Supports a wide range of wet processing applications
- Adaptable to specific semiconductor fabrication needs
User-Friendly Operation
- Intuitive interface for easy setup and monitoring
- Quick-access design for effortless maintenance
RCe Series
The Modutek RCe Series of Temperature Control Recirculators was engineered to establish the highest standard for chiller/heater units. We have accomplished this by incorporating reliability, cost of ownership, and safety into every aspect of our design. The RCe Series is composed of a network of components and devices which continuously monitors the system. With a compact design (20.5” x 25” x 15.25”) and an all stainless steel fluid path to prevent corrosion which allows the use of DI water, the RCe Series is the unit to buy!
Benefits
- Di water compatible, no corrosion
- Environmentally friendly
- Internationally accepted
- Easy confirmation of system status, reduced troubleshooting time
- Ease of maintenance with no fuses to replace
Features
- Stainless Steel fluid path
- CFC Free refrigerant (134A Freon)
- SEMI S2-93 & CE compliant
- User friendly status display
- Independent circuit breaker protection
System Specifications
- Heating Capacity: standard-1500W(other sizes available upon request)
- Cooling Capacity: standard – 1/4hp(other sizes available upon request)
- Stainless Reservoir with plastic as an option
- Accuracy: 0.2ºC – depending on controller
- Reservoir fill: Top of unit
- Dimensions: 20.5” (l) x 25” (w) x 15.25” (h)
Facility Reaquirements
- Electrical: 120VAC, 50/60Hz, 10, 20A (option : 208VAC, 4-wire Circuit)Rating for standard RCe025-1500)
- Circulating fluid: ½” FNPT inlet/outlet
- Remote controller: Modutek C21b or equivalent
Construction Materials
- Housing: Gray powder epoxy coated 16ga mild steel.
- Fluid Path: Tubing and Fittings- Stainless Steel(option: all polypropylene)
- Pump – Polypropylene
Applications
- Constant temperature baths (F series)
- Etching, Plating, and Developing
Benefits
- Di water compatible, no corrosion
- Environmentally friendly
- Internationally accepted
- Easy confirmation of system status, reduced troubleshooting time
- Ease of maintenance with no fuses to replace
Features
- Stainless Steel fluid path
- CFC Free refrigerant (134A Freon)
- SEMI S2-93 & CE compliant
- User friendly status display
- Independent circuit breaker protection
System Specifications
- Heating Capacity: standard-1500W(other sizes available upon request)
- Cooling Capacity: standard – 1/4hp(other sizes available upon request)
- Stainless Reservoir with plastic as an option
- Accuracy: 0.2ºC – depending on controller
- Reservoir fill: Top of unit
- Dimensions: 20.5” (l) x 25” (w) x 15.25” (h)
Facility Reaquirements
- Electrical: 120VAC, 50/60Hz, 10, 20A (option : 208VAC, 4-wire Circuit)Rating for standard RCe025-1500)
- Circulating fluid: ½” FNPT inlet/outlet
- Remote controller: Modutek C21b or equivalent
Construction Materials
- Housing: Gray powder epoxy coated 16ga mild steel.
- Fluid Path: Tubing and Fittings- Stainless Steel(option: all polypropylene)
- Pump – Polypropylene
Applications
- Constant temperature baths (F series)
- Etching, Plating, and Developing
Benefits
- Di water compatible, no corrosion
- Environmentally friendly
- Internationally accepted
- Easy confirmation of system status, reduced troubleshooting time
- Ease of maintenance with no fuses to replace
Features
- Stainless Steel fluid path
- CFC Free refrigerant (134A Freon)
- SEMI S2-93 & CE compliant
- User friendly status display
- Independent circuit breaker protection
System Specifications
- Heating Capacity: standard-1500W(other sizes available upon request)
- Cooling Capacity: standard – 1/4hp(other sizes available upon request)
- Stainless Reservoir with plastic as an option
- Accuracy: 0.2ºC – depending on controller
- Reservoir fill: Top of unit
- Dimensions: 20.5” (l) x 25” (w) x 15.25” (h)
Facility Reaquirements
- Electrical: 120VAC, 50/60Hz, 10, 20A (option : 208VAC, 4-wire Circuit)Rating for standard RCe025-1500)
- Circulating fluid: ½” FNPT inlet/outlet
- Remote controller: Modutek C21b or equivalent
Construction Materials
- Housing: Gray powder epoxy coated 16ga mild steel.
- Fluid Path: Tubing and Fittings- Stainless Steel(option: all polypropylene)
- Pump – Polypropylene
Applications
- Constant temperature baths (F series)
- Etching, Plating, and Developing
Contact us if you need more information about using our Temperature Control Circulator to support your process.