Wet Processing Tabletop Baths for Acids and Solvents
Home / Wet Processing Equipment Components / Wet Processing Tabletop Bath
Modutek provides small tabletop baths to support chemical wet processing at research labs and universities for proof of concept or prototyping. Using a typical semiconductor manufacturing line for this purpose is expensive and does not provide flexibility. The use of small tabletop baths allows wet processing to be scaled back to reduce equipment size without losing required functionality. Modutek’s wet processing tabletop baths support the most important silicon wet processing functions needed to produce small volumes semiconductor products quickly and efficiently.
Support For Most Chemical Wet Processes
Modutek’s chemical wet processing tabletop baths are compact, self-supporting units that consist of a Temperature Remote control box and either a Teflon® tank for acid processes or a stainless-steel tank for solvent processes. The tanks are available as ambient or temperature-controlled models and can be static baths or recirculating baths with a filter.
Modutek’s Tabletop Baths Support the following Chemical Wet Processes:
- KOH Etching
- Solvent Resist Strip
- Buffered Oxide Etch (BOE)
- Other Wet Processes Available
Modutek provides small table top units to support chemical wet processing at research labs and universities for proof of concept or prototyping. Using a typical semiconductor manufacturing line for this purpose is expensive and does not provide flexibility. The use of small table top units allows wet processing to be scaled back to reduce equipment size without losing required functionality. Modutek’s table top units support the most important silicon wet processing functions needed to produce small volumes semiconductor products quickly and efficiently.
Support For Most Chemical Wet Processes
Modutek’s table top chemical wet processing systems are compact, self-supporting units that consist of a Temperature Remote control box and either a Teflon® tank for acid processes or a stainless-steel tank for solvent processes. The tanks are available as ambient or temperature-controlled models and can be static baths or recirculating baths with a filter.
Modutek’s Table Top Units Support the following Chemical Wet Processes:
- KOH Etching
- Solvent Resist Strip
- Buffered Oxide Etch (BOE)
- Other Wet Processes Available
Wet Processing Tabletop Baths for Acids
Benefits
- Easy to Install
- Requires little space
- Ideal for R&D needs using acid applications
- Less expensive than manual wet processing bench
- Supports most common acid wet processes
- Fully customizable for specific applications
Features
- 360-degree serration overflow
- Condensing refluxor – optional
- Custom tank sizes available
- Low level, High Limit, High Temperature and Drain Interlock standand
Specifications
- Applications: KOH and TMAH
- Operating temperature range: 30 – 100º C
- Process temperature control: ± 0.5º C
- Heat-up rate: 2-3º C per minute (rate affected by size of system)
- One year warranty
Construction Materials
- All PFA Teflon®
- Natural Polypro
- PVDF
Options
- Teflon® gravity drain system
- Remote temperature control box with low voltage control circuit and high voltage heater circuit
- All components(Breakers, Controller, Transformer)meet safety requirements and are UL listed.
Benefits
- Easy to Install
- Requires little space
- Ideal for R&D needs using acid applications
- Less expensive than manual wet processing bench
- Supports most common acid wet processes
- Fully customizable for specific applications
Features
- 360-degree serration overflow
- Condensing refluxor – optional
- Custom tank sizes available
- Low level, High Limit, High Temperature and Drain Interlock standand
Specifications
- Applications: KOH and TMAH
- Operating temperature range: 30 – 100º C
- Process temperature control: ± 0.5º C
- Heat-up rate: 2-3º C per minute (rate affected by size of system)
- One year warranty
Construction Materials
- All PFA Teflon®
- Natural Polypro
- PVDF
Options
- Teflon® gravity drain system
- Remote temperature control box with low voltage control circuit and high voltage heater circuit
- All components(Breakers, Controller, Transformer)meet safety requirements and are UL listed.
Benefits
Benefits
- Easy to Install
- Requires little space
- Ideal for R&D needs using acid applications
- Less expensive than manual wet processing bench
- Supports most common acid wet processes
- Fully customizable for specific applications
Features
Features
- 360-degree serration overflow
- Condensing refluxor – optional
- Custom tank sizes available
- Low level, High Limit, High Temperature and Drain Interlock standand
Specifications
Specifications
- Applications: KOH and TMAH
- Operating temperature range: 30 – 100º C
- Process temperature control: ± 0.5º C
- Heat-up rate: 2-3º C per minute (rate affected by size of system)
- One year warranty
Construction Materials
- All PFA Teflon®
- Natural Polypro
- PVDF
Options
Options
- Teflon® gravity drain system
- Remote temperature control box with low voltage control circuit and high voltage heater circuit
- All components(Breakers, Controller, Transformer)meet safety requirements and are UL listed.
Wet Processing Tabletop Baths for Solvents
Benefits
- Easy to Install
- Requires little space
- Ideal for R&D needs using solvent applications
- Less expensive than manual wet processing bench
- Supports most common solvent wet processes
- Fully customizable for specific applications
Features
- Grounded vessel
- 4-sided heating element
- 360º overflow weir
- Dual safety snap switch
- Radius corner design
- Electropolished
Specifications
- Applications: All solvents
- Solvents: IPA, Acetone, Resist Strippers
- Operating temperature range: 30 º – 100 ºC
- Process temperature control: ± 1 ºC (depends on controller and process)
- Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
Facility Requirements
- Electrical: 208VAC, 50 / 60 Hz, 1Ø (current requirements depends on bath size)
Construction Materials
- Process Vessel: 316L Stainless Steel Electropolished
- Outer Housing: Stainless steel or FM4910-approved material
- Process thermocouple: Teflon encapsulated J-type
- Insulation: High-density alumina silica fiber rated to 1260 º C
Options
- Liquid Level Sensor
- Stainless steel diffuser plate
- Process temperature controller
- Custom vessel sizes
- Remote temperature control box with low voltage control circuit and high voltage heater circuit
- All components (Breakers, Controller, Transformer) meet safety requirements and are UL listed.
Benefits
- Easy to Install
- Requires little space
- Ideal for R&D needs using solvent applications
- Less expensive than manual wet processing bench
- Supports most common solvent wet processes
- Fully customizable for specific applications
Features
- Grounded vessel
- 4-sided heating element
- 360º overflow weir
- Dual safety snap switch
- Radius corner design
- Electropolished
Specifications
- Applications: All solvents
- Solvents: IPA, Acetone, Resist Strippers
- Operating temperature range: 30 º – 100 ºC
- Process temperature control: ± 1 ºC (depends on controller and process)
- Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
Facility Requirements
- Electrical: 208VAC, 50 / 60 Hz, 1Ø (current requirements depends on bath size)
Construction Materials
- Process Vessel: 316L Stainless Steel Electropolished
- Outer Housing: Stainless steel or FM4910-approved material
- Process thermocouple: Teflon encapsulated J-type
- Insulation: High-density alumina silica fiber rated to 1260 º C
Options
- Liquid Level Sensor
- Stainless steel diffuser plate
- Process temperature controller
- Custom vessel sizes
- Remote temperature control box with low voltage control circuit and high voltage heater circuit
- All components (Breakers, Controller, Transformer) meet safety requirements and are UL listed.
Benefits
Benefits
- Easy to Install
- Requires little space
- Ideal for R&D needs using solvent applications
- Less expensive than manual wet processing bench
- Supports most common solvent wet processes
- Fully customizable for specific applications
Features
Features
- Grounded vessel
- 4-sided heating element
- 360º overflow weir
- Dual safety snap switch
- Radius corner design
- Electropolished
Specifications
Specifications
- Applications: All solvents
- Solvents: IPA, Acetone, Resist Strippers
- Operating temperature range: 30 º – 100 ºC
- Process temperature control: ± 1 ºC (depends on controller and process)
- Heat-up rate: 2 º C per minute (rate affected by size of system, fluid, etc.)
Facility Requirements
- Electrical: 208VAC, 50 / 60 Hz, 1Ø (current requirements depends on bath size)
Construction Materials
- Process Vessel: 316L Stainless Steel Electropolished
- Outer Housing: Stainless steel or FM4910-approved material
- Process thermocouple: Teflon encapsulated J-type
- Insulation: High-density alumina silica fiber rated to 1260 º C
Options
Options
- Liquid Level Sensor
- Stainless steel diffuser plate
- Process temperature controller
- Custom vessel sizes
- Remote temperature control box with low voltage control circuit and high voltage heater circuit
- All components (Breakers, Controller, Transformer) meet safety requirements and are UL listed.
Contact us if you need more information about on our Wet Processing Tabletop Baths to support your process.